In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode Fabrication L=L1+L2:=200+130=330mm

L=L1+L2:=200+130=330mm

(+/- 10%) with roughness: ~10 nm RMS as measured by the Wyko (white light interferometer) for 50 umx50 um area

0) is included to set various working modes for measuring capacity and lifecycle for all types of rechargeable batteries

or  heating plate into the chamber

Max heating or cooling rate < 5oC/ minute

In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode Fabrication L=L1+L2:=200+130=330mmEQ TM106 LD is a high precision thickness sensor monitor for the thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystals oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub Angstrom (0. 037 for this equipment). SPECIFICATIONS: Power 5 VDC, 400 mA Frequency Range 6. 0