E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded SEMI D38-0304 (first published)

SEMI D38-0304 (first published)

originally published in 1983

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SEMI E134-0704 (first published)

E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded SEMI D38-0304 (first published)1 Purpose 1. 1 The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below. 2 Scope 2. 1 The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment,