HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current org in November 2004

org in November 2004

The pellicle exclusion volumes of this Specification accommodate pellicles which extend the full length of the reticle and up to a maximum pellicle width of 124 mm

This Document is a guide to a test method to determine gas change/purge efficiency of gas delivery system

Detailed information on the method is found in ASTM G48

This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16

HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current org in November 2004This Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in June 2015. Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices, in particular high brightness light emitting diodes (HB LED). In SEMI HB1 a multitude of