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E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology to be published February 1999
E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology to be published February 1999
$115.50
Description
to be published February 1999
SEMI S5-1121 (technical revision)
This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool
The surface characterization tests to be performed are specified herein
This standard defines the concepts required for management of recipes
E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology to be published February 1999global Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.
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