D08000 - SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time StdPbc-0524 SEMI D80-0421 (first published)

SEMI D80-0421 (first published)

この文書は，薬液分配システム部品の列挙された試験方法（表3参照）に共通した部品前処理及び分析基準の全てを定義し，仕様を定める。各タイプの部品は，出所の明らかな化学試験方法を用いて試験される前に，この文書の手順に従って前処理され，準備されるべきである。

3  This Standard applies to semiconductor processing equipment RF power-delivery systems whose power is directly used to produce and sustain the plasma or is electrically connected to the plasma (i

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping System and Components

SEMI C71-0421 (technical revision)

D08000 - SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time StdPbc-0524 SEMI D80-0421 (first published)High gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation for determining the water vapor transmission rate of plastic film using a quadrupole mass spectrometer as detector. Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays. Referenced SEMI Standards (purchase separately)