G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded 製品やレチクルの保護あるいはEMI制御について

製品やレチクルの保護あるいはEMI制御について

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

associated support equipment and facilities infrastructure equipment function within acceptable ranges

The maintenance of a control chart to monitor the long-term stability of the measurement process is required

SEMI E52 — Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers (Replaced by SEMI AUX030)

G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded 製品やレチクルの保護あるいはEMI制御についてGlobal Assembly and Packaging CommitteeJapanese Packaging Committee2004723Japanese Regional Standards Committee20049www. semi. org2004111990 Na+NH4+K+Cl NO3 Br SO42 PO43 Referenced SEMI Standards None.