M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI F48-0600 (Reapproved 1214)

SEMI F48-0600 (Reapproved 1214)

at both module and equipment level

and two classes of larger diameter test wafers (from 150 mm)

called the SECS Equipment Data Dictionary (SEDD)

1  This Specification defines the data items that are required to report

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded SEMI F48-0600 (Reapproved 1214)This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which