E17200 - SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) Revision:SEMI E172-1023 - Superseded It will lead to substantially

It will lead to substantially reduced costs

samples previously obtained and cleaned according to SEMI F40 are analyzed for trace inorganics using inductively coupled plasma-mass spectrometry (ICP-MS)

with an MFC that has been equalized to ambient conditions for 24 hours before the application of power

acetal resin

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E17200 - SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) Revision:SEMI E172-1023 - Superseded It will lead to substantially* This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version. The