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E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded This Standard specifies EUV Pod
E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded This Standard specifies EUV Pod
$193.00
Description
This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle
This Test Method applies to valves
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E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded This Standard specifies EUV PodNOTICE: SEMI E19. 4 and SEMI E19. 5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately. This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www. semiviews. org and www. semi. org in April 2017; originally published in
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