P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes 이 문서(Document)는 내부 버퍼 장비의

이 문서(Document)는 내부 버퍼 장비의 캐리어 전송뿐만 아니라

본 버전은 global Audits and Reviews Subcommittee 에 의해 2013년 6월 4일 간행이 승인되었다

It has been replaced by SEMI F119

1  This version of the Specification applies to the substrate types: wafers

Traceability Requirements

P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes 이 문서(Document)는 내부 버퍼 장비의This guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain