E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded such as an optical filar

such as an optical filar

It is easily ignited in the presence of air

described by a third entity) is outside the scope of this Standard

SEMI G38-0996 (Reapproved 0811)

and mirrors

E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded such as an optical filarNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment