P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 SEMI MS5-1107 (first published)

SEMI MS5-1107 (first published)

1-0312 - Specification for SECS-II Protocol Substrate Tracking

with an MFC that has been equalized to ambient conditions for 24 hours before the application of power

or specific components when dedicated training equipment is not available

この安全ガイドラインは，危険性ガスのFLDを取り扱うものである。これらのデバイスは，FLDあるいはその下流で，制御されない放出の流量を制限することを意図している。

P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 SEMI MS5-1107 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i. e., the manufacturing of very large scale integrated circuits). Also included are