P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 The purpose of this standard

The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts

an automated approach to fabrication of suitable test structures using standard tools available in modern wafer fabs

production equipment including process and metrology equipment

SEMI C38 — Guide for Phosphorus Oxychloride

表面に存在する静電気電荷は，半導体製造環境の中で多くの望ましくない効果を引き起こす｡

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 The purpose of this standardThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain