F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded —装置内，ならびにFICS レベルでの分割レシピの管理機能の装備。統合用の同管理アプリケーションの要求が無くとも備えなければならない。

—装置内，ならびにFICS レベルでの分割レシピの管理機能の装備。統合用の同管理アプリケーションの要求が無くとも備えなければならない。

SEMI F15-93 (Reapproved 1104)

semiconductor manufacturers

and substrate ID

SEMI D71-0614 (first published)

F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded —装置内，ならびにFICS レベルでの分割レシピの管理機能の装備。統合用の同管理アプリケーションの要求が無くとも備えなければならない。This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on www. semi. org August 2001; to be published November 2001. Originally published June 2000. NOTICE: This Standard or Safety Guideline has an